* 1. Homoepitaxy
The role of the reconstruction . Step-flow growth and kinetic roughening. Magic islands - semiconductor and metal homoepitaxy.
* 2. Semiconductor-semiconductor and metal-semiconductor heteroepitaxy
The role of the stress. Dislocations. Growth of heterostructures - Stranski-Krastanov Growth. Quantum dots, wires and superlattices. Semiconductor lasers. Magnetic multilayers. GaAs epitaxy. Si-Ge heteroepitaxy, Metals on semiconductors - mixed reconstructions
* 3. Metal heteroepitaxy on metals and oxides
General aspects of metal epitaxy, metal alloys, ordered alloys, active getters. Active oriented metal clusters and their role in heterogeneous catalysis. Gas sensors. Measurement of physical and chemical properties of heteroepitaxial systems using surface sensitive techniques, structure and morphology determination.
The lecture is devoted to special aspects of homoepitaxial and heteroepitaxial thin film growth. Homoepitaxy - oriented growth, growth on singular and vicinal surfaces, growth on reconstructed surfaces, 2D-3D transition.
Heteroepitaxy - heteroepitaxial growth of thin films, their physical and chemical properties and methods of analysis. Attention will be paid to metal-metal and metal-oxid systems.
Role of the stress and surface reconstruction on film morphology (examples for metal-semiconductor and semiconductor-semiconductor systems). Selforganization.