Publications
- Deposition of Ba(x)Sr(1-x)TiO3 thin Films by Double RF Hollow Cathode Plasma Jet System2008 | Faculty of Mathematics and Physics
- Spatial Distribution of Plasma Parameters in DC-Energized Hollow Cathode Plasma Jet2010 | Faculty of Mathematics and Physics
- Measuring the Ion Flux to the Deposition Substrate in the Hollow Cathode Plasma Jet2008 | Faculty of Mathematics and Physics
- Electrical Probe Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiOx Thin Films2008 | Faculty of Mathematics and Physics
- Low pressure plasma-jet systems and their application for deposition of ceramic thin films2007 | Faculty of Mathematics and Physics
- Using plasma sources of jet types for deposition of thin TiOx layers2007 | Faculty of Mathematics and Physics
- Electric probe diagnostics of the hollow cathode plasma jet system for TiOx thin films deposition2007 | Faculty of Mathematics and Physics
- Measuring the Ion Current to the Substrate During Deposition of Thin Films by Hollow Cathode Plasma Jet2007 | Faculty of Mathematics and Physics
- Measurement of plasma parameters in low temperature high density hollow cathode plasma jet working in magnetic field2006 | Faculty of Mathematics and Physics
- Measurements of plasma parameters during BaXSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system2006 | Faculty of Mathematics and Physics
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