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Optical and structural study of BST multilayers

Publication at Faculty of Mathematics and Physics |
2010

Abstract

Ba0.75Sr0.25TiO3/SrTiO3 multilayers were grown by plasma laser deposition on platinized silicon. Their total thickness was about 300 nm and they consisted of 20 double layers each of thickness 8 nm.

X-ray diffraction was used for the characterization of sample microstucture, and surface profiler (alpha step) to determine the film thickness and surface roughness.