Abstract
Metal and metal oxide nanoclusters were prepared by means of the cluster source of a Haberland type. Two types of nanocluster sources assembled in our laboratory and implementing 2” and 3” magnetrons were operated in a DC mode in order to prepare silver and aluminium clusters.
Large fraction of clusters was electrically charged both negatively and positively. Formation of nanoclusters and their charging was studied in dependence on experimental conditions using SEM, TEM, QCM and XPS.