Aging of nanocluster Ti/TiOx films prepared by means of gas aggregation cluster source

Abstrakt

Nanocluster films composed of Ti and TiOx were prepared using a gas aggregation cluster source. The prepared nanocluster films were studied by a variety of methods in order to fully characterize their properties.

Special attention was paid to the description of oxidation of the titanium nanoclusters and other changes in the films connected with aging.

Klíčová slova

• Aging
• Cluster source
• Oxidation
• TiO2