Publication at Faculty of Mathematics and Physics, Central Library of Charles University |
2005
Abstract
Spectroscopic ellipsometry (SE) is used to study a sinusoidal-relief grating fabricated on a surface of transparent polymer. An optically thick polymer layer is situated on a glass substrate and its refraction index is optically matched to the index of the glass.
The rigorous coupled wave analysis, implemented as the Airy-like internal reflection series, is applied to calculate the optical response of the relief grating.