Spectroscopic ellipsometry on sinusoidal surface-relief gratings

Abstrakt

Spectroscopic ellipsometry (SE) is used to study a sinusoidal-relief grating fabricated on a surface of transparent polymer. An optically thick polymer layer is situated on a glass substrate and its refraction index is optically matched to the index of the glass.

The rigorous coupled wave analysis, implemented as the Airy-like internal reflection series, is applied to calculate the optical response of the relief grating.