Langmuir probe diagnostics of Ar planar magnetron discharge with reactive admixtures N2 and O2 | Charles Explorer

Langmuir probe diagnostics of Ar planar magnetron discharge with reactive admixtures N2 and O2

Publication at Faculty of Mathematics and Physics |

2005

Abstract

Langmuir probe diagnostics of Ar planar magnetron discharge with reactive admixtures N2 and O2

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