Langmuir probe diagnostics of Ar planar magnetron discharge with reactive admixtures N2 and O2 | Charles Explorer

Langmuir probe diagnostics of Ar planar magnetron discharge with reactive admixtures N2 and O2

Publikace na Matematicko-fyzikální fakulta |

2005

Abstrakt

Langmuir probe diagnostics of Ar planar magnetron discharge with reactive admixtures N2 and O2

Osoby