Study of gas impurities and discharge tube material influence on plasma composition during plasma oxidation: the optical emission spectroscopy study | Charles Explorer

Study of gas impurities and discharge tube material influence on plasma composition during plasma oxidation: the optical emission spectroscopy study

Publication at Faculty of Mathematics and Physics, Central Library of Charles University |

2003

Abstract

Study of gas impurities and discharge tube material influence on plasma composition during plasma oxidation: the optical emission spectroscopy study

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