Light Emitting Wide Band Gap a-Si:H Deposited by Microwave Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapour Deposition | Charles Explorer

Light Emitting Wide Band Gap a-Si:H Deposited by Microwave Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapour Deposition

Publication at Faculty of Mathematics and Physics |

2000

Abstract

Light Emitting Wide Band Gap a-Si:H Deposited by Microwave Electron-Cyclotron-Resonance Plasma-Enhanced Chemical Vapour Deposition

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