Nanocomposite Films with Plasma Polymer Matrix Prepared Using a Gas Aggregation Cluster Source

Abstrakt

Basics of plasma polymerization processes are introduced. Principles of the gas aggregation cluster source (GAS) are briefly reviewed including recent improvements.

Deposition and characterization of nanocomposite films are described.

Klíčová slova

• Nanoclusters
• Gas Aggregation Source