Publication at Faculty of Mathematics and Physics |
2016
Abstract
Deposition parameters and spatial variations of plasma parameters have been investigated in gas aggregation cluster source (GAS) with planar magnetron. Special construction of axially movable gas aggregation chamber in combination with radially movable Langmuir probe allows us to obtain 2D profiles of plasma parameters.
In addition to probe diagnostic, we used quartz-crystal microbalance (QCM), mass spectrometer, and optical emission spectroscopy (OES) for simultaneous monitoring of plasma composition and deposition conditions. Measurements were performed in pure argon and in argon with oxygen admixture.