Publication at Faculty of Mathematics and Physics |
2017
Abstract
The floating harmonic probe (FHP) is a relatively new plasma diagnostic method, which was proposed to be used in conditions when insulating films are being deposited on the probe and classical Langmuir probe method fails. An AC voltage is applied to the FHP and from the measured AC probe current waveforms the electron temperature and the ion density can be obtained.
In this contribution we present the comparison of the FHP with the classical Langmuir probe and results obtained during deposition of insulating iron oxide thin film.