Abstrakt
The metal ionized flux fraction and production of double charged metal ions Me2+ of different materials (Al, Cu, Fe, Ti) by High Power Impulse Magnetron Sputtering (HiPIMS) operated with and without a pre-ionization assistance is compared in the paper. The Electron Cyclotron Wave Resonance (ECWR) discharge was employed as the pre-ionization agent providing a seed of charge in the idle time of HiPIMS pulses.
A modified grid-free biased quartz crystal microbalance was used to estimate the metal ionized flux fraction xi. The energy-resolved mass spectrometry served as a complementary method to distinguish particular ion contributions to the total ionized flux onto the substrate.
The ratio between densities of doubly Me2+ and singly Me+ charged metal ions was determined. It is shown that ECWR assistance enhances Me2+ production with respect of absorbed rf-power.
The ECWR discharge also increases the metal ionized flux fraction of about 30% especially in the region of lower pressures. Further, the suppression of the gas rarefaction effect due to enhanced secondary electron emission of Me2+ was observed. (C) 2014 AIP Publishing LLC.