Surface Modification by Plasma-Based and Related Methods Demonstrated on Magnetron Sputtering of Polylactic Acid
2019
Abstract
In this work, a brief review of plasma-based methods and related physical and chemical methods of modification of surfaces is given. The methods are categorized according to their applications.
In the experimental part of this work, low-temperature plasma surface treatment is demonstrated on RF (13.56 MHz) magnetron sputtering of polylactic acid (PLA) on silicon (Si) substrate. Thin films were formed from species sputtered from the PLA target and properties of these films were investigated by XPS and FTIR.
Dependency of the deposition rate on RF discharge power was also determined.