The structural evolution of light-ion implanted 6H-SiC single crystal: Comparison of the effect of helium and hydrogen

Abstract

The microstructure evolution of hydrogen-implanted 6H-SiC at different temperatures and fluences is investigated by using various exerimental techniques.

Keywords

• structural
• evolution
• light-ion
• implanted
• 6H-SiC
• single
• crystal
• Comparison
• effect
• helium
• hydrogen