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Sn-CeO2 thin films prepared by rf magnetron sputtering: XPS and SIMS study

Publication at Faculty of Mathematics and Physics |
2009

Abstract

The purpose of this study was to contribute to the elucidation of the Sn-Ce interaction mechanism in mixed oxides prepared by simultaneous magnetron sputtering of ceria and tin. Non-reactive rf magnetron sputtering was used to deposit CeO2 and Sn-CeO2 thin films on Si(1 0 0) wafer substrates. The prepared samples were investigated by secondary ion mass spectroscopy (SIMS) and X-ray photoelectron spectroscopy (XPS) using a conventional laboratory X-ray source