Study of plasma-solid interaction in electronegative gas mixtures at higher pressures

Abstract

The computer analysis of the plasma surface treatment of materials at higher pressures is computationally difficult due to increasing number of collisions between plasma particles. In the contribution new algorithms for the efficient particle modelling of this process were suggested and successfully tested.

Keywords

• Study
• plasma-solid
• interaction
• electronegative
• mixtures
• higher
• pressures