Non-Maxwellian electron energy distribution function in He, He/Ar, He/Xe/H2 and He/Xe/D2 low temperature afterglow plasma

Abstract

Experimental studies of the electron energy distribution function EEDF under well defined conditions in flowing afterglow plasma, using a Langmuir probe are reported. The EEDF is measured in He2 and Ar dominated plasmas and in XeH and XeD dominated recombining plasmas.

Keywords

• Non-Maxwellian
• electron
• energy
• distribution
• function
• He/Ar
• He/Xe/H2
• He/Xe/D2
• temperature
• afterglow
• plasma