Recently, the vacuum technology has gained a significant relevance in many areas of basic research and applied science. Low-pressure environment of various quality is in common use in the top technology industrial applications.
In the most cases, the leaks are the most common sources of deterioration in quality of vacuum. Therefore, the leak detection and consequential leak localization become as a joint part of researcher's and engineer's work.
A new method suitable for low vacuum region and large vacuum leaks was developed. The method focuses on detection of leaks from vacuum flanges