RF magnetron sputtering of nylon in N2/H2 discharge mixtures: Process characterisation by means of mass spectroscopy

Abstract

RF magnetron sputtering of Nylon in N2/H2 mixtures was monitored by mass spectroscopy. Density and energy of species present in discharge were correlated with external parameters.

Keywords

• magnetron
• sputtering
• nylon
• N2/H2
• discharge
• mixtures
• Process
• characterisation
• means
• spectroscopy