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Langmuir Probe Diagnostics of DC Hollow Cathode Discharge During TiOx Deposition
Publication at Faculty of Mathematics and Physics
|
2008
4 people
Abstract
Langmuir Probe Diagnostics of DC Hollow Cathode Discharge During TiOx Deposition
Keywords
Langmuir
Probe
Diagnostics
Hollow
Cathode
Discharge
During
Deposition
People
person
Mgr. Irena Picková Ph.D.
Faculty of Mathematics and Physics
person
prof. RNDr. Milan Tichý DrSc.
Faculty of Mathematics and Physics
person
doc. Mgr. Pavel Kudrna Dr.
Faculty of Mathematics and Physics
person
Oksana Yosypchuk
Person without faculty affiliation