Formation of TiOx films produced by high-power pulsed magnetron sputtering (Art. No. 055202 ) | Charles Explorer

Formation of TiOx films produced by high-power pulsed magnetron sputtering (Art. No. 055202 )

Publication at Faculty of Mathematics and Physics |

2008

Abstract

Formation of TiOx films produced by high-power pulsed magnetron sputtering

Keywords

Formation films produced high-power pulsed magnetron sputtering 055202

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