The use of diaphragm bellows to construct a constant pressure gas flowmeter for the flow rate range 10^(-7) Pa m^3 s^(-1) to 10^(-1) Pa m^3 s^(-1)

Abstract

The use of diaphragm bellows to construct a constant pressure gas flowmeter for the flow rate range 10^(-7) Pa m^3 s^(-1) to 10^(-1) Pa m^3 s^(-1)

Keywords

• diaphragm
• bellows
• construct
• constant
• pressure
• flowmeter
• range