Electrical Probe Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiOx Thin Films

Abstract

Electrical Probe Diagnostics of the Hollow Cathode Plasma Jet System for Deposition of TiOx Thin Films

Keywords

• Electrical
• Probe
• Diagnostics
• Hollow
• Cathode
• Plasma
• System
• Deposition
• Films