Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials

Abstract

Spectroscopic ellipsometry (SE) in the visible/near-UV range is applied to monitor optical critical dimensions of quartz, Si, and Ta gratings, namely the depth, linewidth, and period. SE results are analysed using rigorous coupled-wave theory.

Keywords

• Convergence
• properties
• critical
• dimension
• measurements
• spectroscopic
• ellipsometry
• gratings
• various
• materials