Severe plastic deformation as a Means of producing ultra-fine-grained net-shaped micro-electro-mechanical system parts.

Abstract

Severe plastic deformation as a Means of producing ultra-fine-grained net-shaped micro-electro-mechanical system parts.

Keywords

• Severe
• plastic
• deformation
• Means
• producing
• ultra-fine-grained
• net-shaped
• micro-electro-mechanical
• system
• parts