Study of crystallization of magnetron sputtered TiO2 thin films by X-ray scattering | Charles Explorer

Study of crystallization of magnetron sputtered TiO2 thin films by X-ray scattering

Publication at Faculty of Mathematics and Physics |

2007

Abstract

Study of crystallization of magnetron sputtered TiO2 thin films by X-ray scattering

Keywords

Study crystallization magnetron sputtered films X-ray scattering

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