Electric probe diagnostics of the hollow cathode plasma jet system for TiOx thin films deposition | Charles Explorer

Electric probe diagnostics of the hollow cathode plasma jet system for TiOx thin films deposition

Publication at Faculty of Mathematics and Physics |

2007

Abstract

Electric probe diagnostics of the hollow cathode plasma jet system for TiOx thin films deposition

Keywords

Electric probe diagnostics hollow cathode plasma system films deposition

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