Diffuse X-ray scattering in graded SiGe/Si(001) layers using Tersoff model

Abstract

Diffuse X-ray scattering in graded SiGe/Si(001) layers using Tersoff model

Keywords

• Diffuse
• X-ray
• scattering
• graded
• SiGe/Si
• layers
• using
• Tersoff
• model