Composite Ag/C:H:N films prepared by planar magnetron deposition

Abstract

Ag/C:H:N films were prepared by means of DC unbalanced magnetron operated in a gas mixture of nitrogen and n-hexane. Composition of the films was controlled by electric power and by ratio of nitrogen and n hexane.

Physical properties, vissible and infrared spectra and transmission electrom microscopy were used to characterize the films.

Keywords

• Composite
• films
• prepared
• planar
• magnetron
• deposition