Comparison of Thin Dioxide Films Prepared by Plasma Oxidation and by DC Magnetron Reactive Sputtering

Abstract

Comparison of Thin Dioxide Films Prepared by Plasma Oxidation and by DC Magnetron Reactive Sputtering

Keywords

• Comparison
• Dioxide
• Films
• Prepared
• Plasma
• Oxidation
• Magnetron
• Reactive
• Sputtering