Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate (Article No. 053107)

Abstract

Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate

Keywords

• Specular
• spectroscopic
• ellipsometry
• critical
• dimension
• monitoring
• gratings
• fabricated
• thick
• transparent
• plate
• Article
• 053107