Study of Plasma-Solid Interaction in Electronegative Gas Mixtures at Low and Medium Pressures, Art Nr 4.128

Abstract

Study of Plasma-Solid Interaction in Electronegative Gas Mixtures at Low and Medium Pressures

Keywords

• Study
• Plasma-Solid
• Interaction
• Electronegative
• Mixtures
• Medium
• Pressures
• 128