Diagnostics of plasma polymerization process in RF magnetron sputtering and evaporation of polymers | Charles Explorer

Diagnostics of plasma polymerization process in RF magnetron sputtering and evaporation of polymers

Publication at Faculty of Mathematics and Physics |

2005

Abstract

Diagnostics of plasma polymerization process in RF magnetron sputtering and evaporation of polymers

Keywords

Diagnostics plasma polymerization process magnetron sputtering evaporation polymers

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