Tenké filmy BaxSr1-xTiO3 deponované technikou RF hollow cathode plasma jet

Abstrakt

Tenké filmy BaxSr1-xTiO3 deponované technikou RF hollow cathode plasma jet

Klíčová slova

• BaxSr1-xTiO3
• films
• deposited
• hollow
• cathode
• plasma
• technique