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magnetron plasma
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Characterisation of a Magnetron Plasma for Deposition of Titanium Oxide and Titanium Nitride Films
2005 |
Publication without faculty affiliation
publication
Influence of reactive gas admixture on transition metal cluster nucleation in a gas aggregation cluster source
2012 |
Faculty of Mathematics and Physics
publication
Magnetron-sputtered copper nanoparticles: lost in gas aggregation and found by in situ X-ray scattering
2018 |
Faculty of Mathematics and Physics
publication
Effects of oxygen addition in reactive cluster beam deposition of tungsten by magnetron sputtering with gas aggregation
2015 |
Faculty of Mathematics and Physics
publication
Core@shell nanoparticles by inflight controlled coating
2022 |
Faculty of Mathematics and Physics